Ion Source Development for a Compact Proton Beam Writing System II

Abstract

The team has a realistic design for the ion source test bench which is being installed in Singapore. The first test beams with the conventional RF ion source have been achieved. Electron beam calculations have been performed to evaluate different electron guns for their effectiveness in ionizing hydrogen gas molecules in their proposed configuration. At the same time the new proton beam writing beam line developed under grants AOARD 07-4017 & 09-4020, has been further improved and proton beams can now be focused down to 13 x 29 nm2, some of the improvements are related to earlier projects: AOARD 06-4004 & AOARD 05-4037.

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Document Details

Document Type
Technical Report
Publication Date
Feb 17, 2012
Accession Number
ADA567513

Entities

People

  • A. Khursheed
  • C. W. Hagen
  • F. Watt
  • Jeroen A. Van Kan
  • T. Osipowicz

Organizations

  • National University of Singapore

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Charged Particles
  • Communication Systems
  • Electron Beam Lithography
  • Electron Beams
  • Electron Guns
  • Electrons
  • Fabrication
  • Ion Beams
  • Ion Sources
  • Ionization Chambers
  • Ions
  • Particle Beams
  • Photolithography
  • Proton Beams
  • Protons
  • Radio Frequency Power
  • Three Dimensional

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Nanoscale Plasmonic Nanotechnology
  • Nuclear and Radiation Engineering.

Technology Areas

  • Directed Energy
  • Microelectronics