A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

Abstract

Corporation for National Research Initiatives (CNRI) is submitting this Final Report for work performed on an award from the Defense Advanced Research Projects Agency (DARPA) under Grant Number MDA972-03-1-0022. This Grant award supported the program entitled, "A Widely-Accessible Distributed MEMS Processing Environment," also known as the MEMS Exchange program, whereby CNRI established, operated, and advanced a distributed MEMS processing environment in which fabrication and testing of MEMS devices and systems is performed at multiple, geographically dispersed sites located around the country.

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Document Details

Document Type
Technical Report
Publication Date
Oct 29, 2012
Accession Number
ADA569247

Entities

People

  • Michael Huff

Organizations

  • Corporation for National Research Initiatives

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Cameras
  • Ceramic Materials
  • Commerce
  • Computers
  • Contracts
  • Department Of Defense
  • Detectors
  • Fabrication
  • Manufacturing
  • Materials Processing
  • Materials Science
  • Micro-Machines
  • Microelectromechanical Systems
  • Object-Oriented Database Management Systems
  • Optical Materials
  • Silicon Carbide
  • Transducers

Readers

  • Database Systems and Applications
  • Nanofabrication and Microfabrication.
  • Research Science/Academic Research