Monolithic Micromachined Quartz Resonator based Infrared Focal Plane Arrays
Abstract
This report summarizes the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y -cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from Y -cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 kHz/deg. C was experimentally measured.IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 nW/Hz^1/2, a detectivity D of 1 * 10^5 sq cm Hz^1/2/W, and a noise equivalent temperature difference of 4 mK in the 8 -14 m wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined Y -cut-quartz resonators and their IR sensing response. In addition the report also summarizes the work done on viscoelastic measurements performed using micromachined quartz resonators and quartz etching work undertaken as part of this work.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 05, 2012
- Accession Number
- ADA571449
Entities
People
- Marcelo Pisani
- Mathew Chang
- Ping Kao
- Srinivas Tadigadapa
Organizations
- Pennsylvania State University