Direct Writing of Graphene-based Nanoelectronics via Atomic Force Microscopy

Abstract

This project employs direct writing with an atomic force microscope (AFM) to fabricate simple graphene-based electronic components like resistors and transistors at nanometer-length scales. The goal is to explore their electrical properties for graphene-based electronics. Conducting nanoribbons of graphene were fabricated using thermochemical nanolithography (TCNL). TCNL uses a heated AFM cantilever to provide precise local heating to an insulating fluorographene (FG) substrate. The heat reduces the substrate into a material known as reduced fluorographene (rFG), which exhibits electric properties similar to those of pristine graphene. Compared to other attempts to produce graphene-based devices, this technique is simple, does not involve solvents or other complicated fabrication steps, and allows for the exact placement of the devices on the wafer.

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Document Details

Document Type
Technical Report
Publication Date
May 07, 2012
Accession Number
ADA571834

Entities

People

  • Michael W. Haydell Jr.

Organizations

  • United States Naval Academy

Tags

DTIC Thesaurus Topics

  • Charge Carriers
  • Chemical Vapor Deposition
  • Electrical Properties
  • Electronic Components
  • Electronics
  • Electronics Industry
  • Energy Bands
  • Fabrication
  • Graphene
  • Lithography
  • Materials
  • Materials Processing
  • Materials Science
  • Semiconductors
  • Silicon Carbide
  • Transistors
  • United States Naval Academy

Fields of Study

  • Physics

Readers

  • Applied Combinatorial Optimization and Logic Circuit Design.
  • Nanoscale Plasmonic Nanotechnology
  • Polymer Science and Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene