Instrumentation and Metrology for Nanotechnology
Abstract
This report summarizes the important outcomes of the workshop. The report is organized around five topics (see sidebar at left) and includes for each topic an overview of the current state of the art, goals and challenges, a vision for the future, recommendations for future research, and implementation strategies to accelerate the development of important technology. In addition, a summary of crosscutting computational science issues and challenges is treated as an additional topic. Although not a central focus of the workshop, computational science was recognized as an important element in the future success of the nanometrology component of the NNI. Appendices to the report include the workshop agenda, a list of workshop participants, abstracts submitted in advance of the workshop, and a glossary.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 29, 2004
- Accession Number
- ADA572139