Theoretical Study of the Electronic Structure of the Si3N4(0001) Surface

Abstract

Density functional theory has been applied to a study of the electronic structure of the ideally-terminated, relaxed and H-saturated (0001) surfaces of b-Si3N4 and to that of the bulk material. For the bulk, the lattice constants and atom positions and the valence band density of states are all in good agreement with experimental results. A band gap of 6.7 eV is found which is in fair accord with the experimental value of 5.1?5.3 eV for H-free Si3N4. Using a two-dimensionally-periodic slab model, a p-bonding interaction is found between threefold-coordinated Si and twofold- coordinated N atoms in the surface plane leading to p and p* surface-state bands in the gap. A surface-state band derived from s-orbitals is also found in the gap between the upper and lower parts of the valence band. Relaxation results in displacements of surface and first-underlayer atoms and to a stronger p-bonding interaction which increases the p?p* gap. The relaxed surface shows no occupied surface states above the valence band maximum, in agreement with recent photoemission data for a thin Si3N4 film. The p* band, however, remains well below the conduction band minimum (but well above the Fermi level). Adsorbing H at all dangling-bond sites on the ideally-terminated surface and then relaxing the surface and first underlayer leads to smaller, but still finite, displacements in comparison to the clean relaxed surface. This surface is more stable, by about 3.67 eV per H, than the clean relaxed surface.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2005
Accession Number
ADA574095

Entities

People

  • Victor M. Bermudez

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies
  • Space

DTIC Thesaurus Topics

  • Agreements
  • Band Gaps
  • Band Structures
  • Bulk Materials
  • Chemical Reactions
  • Chemical Vapor Deposition
  • Crystal Lattices
  • Crystal Structure
  • Density Functional Theory
  • Displacement
  • Electrons
  • Energy Bands
  • Fermi Levels
  • Films
  • Materials
  • Materials Processing
  • Military Research

Fields of Study

  • Materials science

Readers

  • Quantum Chemistry
  • Quantum spin resonance or Electron Paramagnetic Resonance spectroscopy.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Space