Temperature Compensation of Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

Abstract

Frequency references with a low phase noise and a low temperature-induced frequency drift are important components for navigation systems, wireless communication systems, and signal processing applications. As is well known, crystal oscillators (XOs) and temperature compensated crystal oscillators (TCXOs) based on AT-cut quartz dominate this market because AT-cut quartz has outstanding frequency-temperature performance and long-term stability. However, there are drawbacks and fabrication limitations for quartz-based resonators related to down-scaling for future applications. In addition, the material properties of quartz limit the integration of the frequency references and the complementary metal-oxide semiconductor (CMOS) circuits on a single chip. As a result, there has been a great interest in the realization of low-cost, CMOS-compatible, high quality factor (Q), and temperature-stable micro-electro-mechanical systems (MEMS) resonators.

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Document Details

Document Type
Technical Report
Publication Date
Dec 14, 2012
Accession Number
ADA575482

Entities

People

  • Chih-ming Lin

Organizations

  • University of California, Berkeley

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Communication Systems
  • Complementary Metal-Oxide Semiconductors
  • Crystal Structure
  • Fabrication
  • Micro-Machines
  • Microelectromechanical Systems
  • Microfabrication
  • Mobile Phones
  • Physical Properties
  • Piezoceramics
  • Piezoelectric Materials
  • Semiconductors
  • Silicon Carbide
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Transducers

Readers

  • Integrated Circuit Design and Technology.
  • Microwave Engineering.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics