Integration of a High Sensitivity MEMS Directional Sound Sensor With Readout Electronics

Abstract

The miniaturization of a sound detection system is of great interest to applications such as sniper location. Current systems in use are larger and do not provide for the unencumbered movement of the warfighter. Inspiration for a smaller MEMS based sensor is therefore taken from the aural system of the fly Ormia ochracea. The focus of this thesis is the design of an integrated and miniaturized device utilizing commercial-off-the-shelf readout electronics with the biologically inspired sensor. An analysis of previously used techniques is presented along with a novel fullyintegrated miniaturized design. Specific investigations include integration with external readout electronics, a hybrid discrete component design, and the fully-integrated single package design. Results include successful operation at all levels of integration and a more thorough analysis of the performance of the fully-integrated design.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2012
Accession Number
ADA577230

Entities

People

  • John D. Roth

Organizations

  • Naval Postgraduate School

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Anechoic Chambers
  • Capacitors
  • Circuit Boards
  • Detection
  • Detectors
  • Directional
  • Electronics
  • Fabrication
  • Frequency Response
  • Integrated Circuits
  • Microelectromechanical Systems
  • Microphones
  • Resonant Frequency
  • Transducers
  • United States
  • United States Naval Academy
  • Very Large Scale Integration

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems