Thermal Conduction Inhomogeneity of Nanocrystalline Diamond Films by Dual-Side Thermoreflectance
Abstract
Thin diamond films of thickness near one micrometer can have highly nonuniform thermal conductivities owing to spatially-varying disorder associated with nucleation and grain coalescence. Here we extract the nonuniformity for nanocrystalline CVD diamond films of thickness 0.5, 1.0, and 5.6 m using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The thermal conductivities vary from less than 100 W m(expn -1) K(expn -1) to more than 1300 W m(expn -1) K(expn -1) and suggest that the most defective material is confined to within one micrometer of the growth surface.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2013
- Accession Number
- ADA577794
Entities
People
- Bradford B. Pate
- Elah Bozorg-grayeli
- Karl D. Hobart
- Kenneth E. Goodson
- Mehdi Asheghi
- Rajinder Sandhu
- Tatyana I. Feygelson
- Vincent Gambin
Organizations
- United States Naval Research Laboratory