Plasmonic Structures for CMOS Photonics and Control of Spontaneous Emission

Abstract

In this project, we have i) demonstrated modulation of the refractive index n >1 at near infrared frequencies during field effect gating of conducting oxide (ITO) thin films for switching applications; ii) demonstrated record low coupling loss from silicon-on-insulator waveguides to dielectrically-loaded surface plasmon polariton waveguides with 1 dB/transition insertion loss and also metal-insulator-metal waveguides; iii) developed a full format CMOS image sensor with plasmonic color filters; iv) explored enhanced spontaneous emission in nanoscale plasmonic cavities and have experimentally observed enhanced spontaneous emission in polymer plasmonic structures; v) developed CMOS Si photonic switching device based on the vanadium dioxide (VO2) phase transition. vi) also engaged in a partnership with the CEA-LETI laboratory and developed a next generation plasMOStor plasmonic metal-insulator-metal device in CMOS Si photonics with copper metallization and SOI waveguide-coupled inputs and outputs.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 2013
Accession Number
ADA578545

Entities

People

  • Harry Atwater

Organizations

  • California Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Films
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Optical Properties
  • Optics
  • Phase Transformations
  • Plasmonic Metamaterials
  • Polaritons
  • Quantum Efficiency
  • Refractive Index
  • Solar Cells
  • Surface Plasmon Polaritons
  • Surface Plasmon Resonance
  • Surface Plasmons
  • Thin Films

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene