A Basic Research for the Development and Evaluation of Novel MEMS Digital Accelerometers
Abstract
This research program develops fundamental understandings necessary for producing novel MEMS/NEMS acceleromters that characterize impact motion with high-precision, high-redundancy, high-frequency-response, high reliability, and high manufacturing repeatability. The accelerometers developed in this research consume a small fraction of power as compared to conventional accelerometers, which makes them ideal choices for applications where available power is limited. This is achived through the design, fabrication,packaging, and testing of a novel high-g MEMS accelerometer. Cantilever beams corresponding to different acceleration levels of 20,000-40,000g are fabricated on low resistivity on (<0.01 -cm) silicon on insulator wafers (SOI). The beams are fabricated in a 0.3 cm by 0.3 cm die which is then packaged and wire bonded in a ceramic package, which is then mechanically shocked for testing and evaluation. Due to the feasibility demonstrated in this research program, the novel accelerometers developed have strong potentials to be adapted in applications in the future.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 2013
- Accession Number
- ADA579087
Entities
People
- Alina Alexeenko
- Dimitrios Peroulis
- Weinong W. Chen
Organizations
- Purdue University