Development of a W-band Serpentine Waveguide Amplifier based on a UV-LIGA Microfabricated Copper Circuit
Abstract
We are developing a 95 GHz, 200 W, wideband vacuum electronic amplifier based on a 20 kV, 120 mA electron beam. The serpentine circuit is fabricated by multilayer UV-LIGA using an embedded polymer monofilament, which produces an all-copper monolithic structure with beam tunnel. We also discuss extension of the technique to upper millimeter-wave circuits at 670 GHz.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 2013
- Accession Number
- ADA579507
Entities
People
- Alan M. Cook
- Alexander N. Vlasov
- Baruch Levush
- Colin D.
- D. Chernin
- David Abe
- Jeffrey P. Calame
- Khanh T. Nguyen
Organizations
- United States Naval Research Laboratory