A Comparative Study of Three Different Chemical Vapor Deposition Techniques of Carbon Nanotube Growth on Diamond Films

Abstract

This paper compares between the methods of growing carbon nanotubes (CNTs) on diamond substrates and evaluates the quality of the CNTs and the interfacial strength. One potential application for these materials is a heat sink/spreader for high-power electronic devices. The CNTs and diamond substrates have a significantly higher specific thermal conductivity than traditional heat sink/spreader materials making them good replacement candidates. Only limited research has been performed on these CNT/diamond structures and their suitability of different growth methods. This study investigates three potential chemical vapor deposition (CVD) techniques for growing CNTs on diamond: thermal CVD (T-CVD), microwave plasma-enhanced CVD (MPECVD), and floating catalyst thermal CVD (FCT-CVD).

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2012
Accession Number
ADA579988

Entities

People

  • Bang-hung Tsao
  • Betty T. Quinton
  • Chakrapani V. Varanasi
  • Jack Burke
  • Kevin J. Yost
  • Paul N. Barnes
  • Sharmila M. Mukhopadhyay

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Air Force Research Laboratories
  • Carbon Nanotubes
  • Chemical Vapor Deposition
  • Diamond Films
  • Electron Microscopes
  • Fullerenes
  • Materials
  • Materials Processing
  • Materials Science
  • Microscopes
  • Military Research
  • Nanomaterials
  • Paper
  • Particle Size
  • Raman Spectroscopy
  • Vapor Deposition

Fields of Study

  • Materials science

Readers

  • Nanocomposite Materials Science
  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene