Functionalized MEMS Sensors for Capacity-Based Residual Life Indicators

Abstract

Technologies that provide real-time assessment of filter impregnate residual lifetime will increase the efficiency of filter usage and ensure safe operating conditions. Detection technologies that are small, low cost, and can be located within or near filter elements are desirable. We are studying highly sensitive microcantilever sensor platforms for residual life indication. Piezoresistive static microcantilevers respond to changes in surface stress by changing resistance as the cantilever deflects from analyte interaction with the surface coating. New cantilevers have been evaluated for this purpose.

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Document Details

Document Type
Technical Report
Publication Date
Aug 24, 2012
Accession Number
ADA580491

Entities

People

  • Alex Robinson
  • Mark Allendorf
  • Peter J Hesketh

Organizations

  • Georgia Tech Research Corporation

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Agreements
  • Cantilever Beams
  • Chemistry
  • Coatings
  • Department Of Defense
  • Detectors
  • Engineering
  • Fabrication
  • Films
  • Frequency
  • Images
  • Mathematics
  • Metal Films
  • Oxide Films
  • Resonant Frequency
  • Stresses
  • Water Vapor

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