Magnetron Sputtering System for Novel Intrinsically Switchable Thin Film Ferroelectric Resonators and Filters

Abstract

The RF magnetron sputtering system shown in Fig. 1 has been sponsored by the Department of Defense through the Army Research Office for the fabrication of novel intrinsically switchable thin film ferroelectric resonators and filters. The system is located in a UV light filtered cleanroom environment and is dedicated to the deposition of ferroelectric BaxSr(1-x)TiO3 thin films. It has been designed for high temperature, high deposition rate, and high uniformity thin film growth and can accommodate wafers up to 4 in diameter. This new system will enable the design and fabrication of fully integrated BST based circuits and systems. It has been assembled from parts that were purchased from various vendors which are listed in the appendix.

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Document Details

Document Type
Technical Report
Publication Date
Aug 03, 2012
Accession Number
ADA580741

Entities

People

  • Amir Mortazawi
  • Victor Lee

Organizations

  • University of Michigan

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Department Of Defense
  • Diameters
  • Fabrication
  • Films
  • High Temperature
  • Information Operations
  • Magnetrons
  • Michigan
  • Military Research
  • Resonators
  • Sputtering
  • Standards
  • Students
  • Technology Transfer
  • Thin Films
  • Universities

Fields of Study

  • Physics

Readers

  • Computational Fluid Dynamics (CFD)
  • Microwave Engineering.
  • Thin Film Deposition Science.