Mechanical and Ferroelectric Response of Highly Textured PZT Films for Low Power MEMS

Abstract

In the reporting 1.5 month period we established the basic experimental tools required to carry out experiments with thin Pt films that serve as top and bottom electrodes in PZT MEMS. The graduate student was trained on materials characterization tools and the microscale thin film testing apparatus at the PI's laboratory. Furthermore, thin Pt films were fabricated at ARL US Army Research Laboratory (ARL) in Adelphi, MD, which are an integral part of the PZT composite films that will be studied in this project.

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 2012
Accession Number
ADA581801

Entities

People

  • Ioannis Chasiotis

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Advanced Electronics
  • Space

DTIC Thesaurus Topics

  • Alternating Current
  • Domain Walls
  • Electric Fields
  • Electronic Mail
  • Ferroelectric Domains
  • Films
  • High Resolution
  • Illinois
  • Information Operations
  • Lead Zirconate Titanates
  • Load Cells
  • Materials
  • Materials Laboratories
  • Microscopy
  • Military Research
  • Piezoelectric Materials
  • Thin Films

Readers

  • Materials Science and Engineering.
  • Research Science/Academic Research
  • Thin Film Deposition Science.