Fabrication and Properties of Organic-Inorganic Nanolaminates Using Molecular and Atomic Layer Deposition Techniques

Abstract

Over the last three years, our AFOSR grant focused on issues related to gas diffusion barriers on flexible polymers. We focused on the fabrication of nanolaminates and alloys using atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The goal was to produce gas diffusion barriers on polymers that were flexible and could function as ultrabarriers to prevent H2O permeation. We focused on three key issues: the critical strains for cracking of Al2O3 ALD films; the improvement of flexibility by fabricating ALD/MLD alloys; and the use of MLD films as compliant interlayers.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 2012
Accession Number
ADA582180

Entities

People

  • Steven M. George

Organizations

  • University of Colorado Boulder

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Synthesis
  • Chemistry
  • Coatings
  • Inorganic Polymers
  • Material Degradation Processes
  • Materials
  • Materials Processing
  • Materials Science
  • Mechanical Properties
  • Mechanics
  • Nanotechnology
  • Organic Chemistry
  • Polymeric Films
  • Polymers
  • Rocky Mountains
  • Silicon Compounds
  • Surface Chemistry

Fields of Study

  • Materials science

Readers

  • Computational Fluid Dynamics (CFD)
  • Thin Film Deposition Science.