Novel Test Fixture for Characterizing Microcontacts: Performance and Reliability

Abstract

Engineers have attempted to improve reliability and lifecycle performance using novel micro-contact metals, unique mechanical designs and packaging. Contact resistance can evolve over the lifetime of the micro-switch by increasing until failure. This work shows the fabrication of micro-contact support structures and test fixture which allow for micro-contact testing, with an emphasis on the fixture's design to allow the determination and analysis of the appropriate failure mode. The other effort of this investigation is the development of a micro-contact test fixture which can measure contact force and resistance directly and perform initial micro-contact characterization, and two forms of lifecycle testing for micro-contacts at rates up to 3kHz. In this work, two different designs of micro-contact structures are fabricated and tested, with each providing advantages for studying micro-contact physics. After fabrication was refined, three functioning fixed-fixed Au micro-contact support structures with contact radii of 4, 6, and 10 μm and two functioning fixed-fixed Ag micro-contacts were tested using the μN force sensor at cycle rates up to 3 kHz. Comparing the PolyMUMPs micro-contact support structure to the fixed-fixed micro-contact support structure, it was determined that the fixed-fixed micro-contact support structure is the best structure for studying the evolution of micro-contact resistance.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2013
Accession Number
ADA582747

Entities

People

  • Benjamin F. Toler

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Accuracy
  • Air Force
  • Carbon Nanotubes
  • Engineering
  • Engineers
  • Fabrication
  • Failure Mode And Effect Analysis
  • Field Effect Transistors
  • Materials
  • Materials Processing
  • Materials Science
  • Mechanics
  • Microelectromechanical Systems
  • Micromachining
  • Modulus Of Elasticity
  • Test Fixtures
  • Three Dimensional

Readers

  • Applied Combinatorial Optimization and Logic Circuit Design.
  • Integrated Circuit Design and Technology.