Glancing Angle Deposition System for Advanced Fabrication of Metamaterial and Transformation-Optics Devices

Abstract

Transformation optics is opening the door to new devices and applications by manipulating the flow of light on the nano-scale combining smart design, material engineering and fabrication. This level of controlling light requires unique and complex structures that are not possible to realize with traditional planar patterning and deposition techniques. While traditional physical vapor deposition systems only allow for 2-Dimensional top-down fabrication, Glancing Angle Deposition (GLAD) allows for quasi 3-Dimensional fabrication of structures.

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Document Details

Document Type
Technical Report
Publication Date
Jun 15, 2012
Accession Number
ADA585286

Entities

People

  • Alexandra Boltasseva

Organizations

  • Purdue University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Agreements
  • Department Of Defense
  • Engineering
  • Fabrication
  • Geometry
  • Manufacturing
  • Materials
  • Materials Science
  • Mathematics
  • Metamaterials
  • Physical Vapor Deposition
  • Students
  • Thickness
  • Three Dimensional
  • Two Dimensional
  • Vapor Deposition

Readers

  • Nanocomposite Materials Science
  • Nanofabrication and Microfabrication.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene