Uncovering the Fundamental Nature of Tribological Interfaces: High Resolution Tribology and Spectroscopy of Ultrahard Nanostructured Diamond Films for MEMS and Beyond

Abstract

The development of an understanding of the tribological properties of carbon based coatings/materials will ultimately provide unique materials needed in the successful implementation of future MEMs devices. MEMs devices, in particular radio frequency MEMs, are viewed as being a promising technology for implementation of future advanced communication devices.

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Document Details

Document Type
Technical Report
Publication Date
Dec 31, 2007
Accession Number
ADA589647

Entities

People

  • Robert Carpick

Organizations

  • University of Pennsylvania

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Coatings
  • Diamond Films
  • Engineers
  • Fabrication
  • Films
  • Frequency
  • Friction
  • High Resolution
  • Materials
  • Mechanical Engineering
  • Mechanical Properties
  • Microelectromechanical Systems
  • Radio Frequency
  • Spectroscopy
  • Surface Chemistry
  • Thin Films
  • Tribology

Readers

  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems