Low-Pressure Chemical Vapor (LPCVD) Graphene Growth Study and Raman Characterization

Abstract

Graphene is a monolayer material comprised of sp2 bonded carbon atoms that form a honeycomb-like lattice structure. Because it is only one atom thick, it is the prototypical two-dimensional material and, as such, exhibits unique physical properties, including a high intrinsic mobility (200,000 cm2/Vs) (1) and a constant optical absorption of 2.3% per layer over a wide spectral range (2). Graphene was first isolated physically by the mechanical exfoliation method (3); however, recent efforts have focused on graphene synthesis by conventional methods, such as chemical vapor deposition (CVD) and ultrahigh vacuum, high temperature annealing (i.e., epitaxial graphene from SiC) (4, 5). CVD, in particular, is a promising growth technique because of the ability to deposit large areas of graphene on inexpensive, transition metal materials (e.g., nickel and copper).

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2013
Accession Number
ADA590053

Entities

People

  • Barbara M. Nichols

Organizations

  • United States Army Research Laboratory

Tags

DTIC Thesaurus Topics

  • Chemical Reactions
  • Chemical Vapor Deposition
  • Films
  • Flow Rate
  • Graphene
  • Hydrogen
  • Intensity
  • Materials
  • Materials Processing
  • Optical Images
  • Physical Properties
  • Raman Spectra
  • Raman Spectroscopy
  • Spectra
  • Spectroscopy
  • Two Dimensional
  • Vapor Deposition

Fields of Study

  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene