Properties of Epitaxial GaN on Refractory Metal Substrates

Abstract

The authors demonstrate here that GaN films with good surface morphology and structural, optical, and electronic properties can be grown on metallic titanium carbide substrates. X-ray rocking curve and Raman scattering measurements confirmed the high crystalline quality of the wurtzite structure film. Variable temperature photoluminescence measurements of sharp and intense emission lines provided insights into the nature of the recombination processes, the carrier background type, and the carrier concentration. The high quality of the interface and substrate Ohmic contacts was verified. The ability to grow high-quality films on metallic substrates provides the means for advanced vertical and high-power and/or high-temperature device fabrication.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Feb 28, 2007
Accession Number
ADA593749

Entities

People

  • Jaime A. Freitas Jr.
  • Jihyun Kim
  • Larry B. Rowland
  • Mohammad Fatemi

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Ceramic Materials
  • Detectors
  • Elements
  • Energy Bands
  • Fabrication
  • Films
  • High Temperature
  • Measurement
  • Metal-Semiconductor Junctions
  • Metals
  • Military Research
  • Raman Scattering
  • Refractory Metals
  • Scattering
  • Semiconductors
  • Silicon Carbide
  • Substrates

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene