Investigation of Influence of Gas Ratio on the Electron Temperature in TiN Magnetron Sputtering Deposition System

Abstract

In this work, a nanolayer of titanium nitride which produced by the magnetron sputtering system is synthesized. Moreover the effect of plasma parameters on the electron temperature is studied. Electron temperature has a significant effect on the plasma coating system properties. The results show that, increasing the working pressure and nitrogen ratio in the system causes decreasing electron temperature.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2013
Accession Number
ADA601119

Entities

People

  • A. R. Niknam
  • H. Latifi
  • H. R. Ghomi
  • S. Ghasemi

Organizations

  • Shahid Beheshti University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Coatings
  • Collisions
  • Electron Energy
  • Electrons
  • Emission
  • Emission Spectroscopy
  • Films
  • Ionization
  • Magnetrons
  • Microelectromechanical Systems
  • Nitrogen
  • Spectra
  • Spectral Lines
  • Spectroscopy
  • Sputtering
  • Titanium

Readers

  • Combustion science or combustion engineering.
  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene