Exploration of MEMS G-Switches at 100-10,000 G-Levels with Redundancy

Abstract

The goal of this research program was to develop fundamental understanding necessary for producing novel MEMS/NEMS accelerometers that will characterize acceleration forces in the range of 100-10,000 g with high-precision, high-redundancy, high-frequency-response, high reliability, and high manufacturing repeatability. Such accelerometers consume a small fraction of power as compared to conventional accelerometers, which makes them ideal choices for applications where available power is limited.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 2014
Accession Number
ADA602474

Entities

People

  • Weinong W. Chen

Organizations

  • Purdue University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Bending Stress
  • Data Processing
  • Fabrication
  • Failure Mode And Effect Analysis
  • Frequency
  • Gas Guns
  • High Reliability
  • Impact Acceleration
  • Impact Loads
  • Manufacturing
  • Materials
  • Measurement
  • Microelectromechanical Systems
  • Reliability
  • Resistance
  • Stress Waves
  • Test And Evaluation

Fields of Study

  • Physics

Readers

  • Fluid Dynamics.
  • Nanoscale Plasmonic Nanotechnology
  • Systems Analysis and Design