Exploration of MEMS G-Switches at 100-10,000 G-Levels with Redundancy
Abstract
The goal of this research program was to develop fundamental understanding necessary for producing novel MEMS/NEMS accelerometers that will characterize acceleration forces in the range of 100-10,000 g with high-precision, high-redundancy, high-frequency-response, high reliability, and high manufacturing repeatability. Such accelerometers consume a small fraction of power as compared to conventional accelerometers, which makes them ideal choices for applications where available power is limited.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 2014
- Accession Number
- ADA602474
Entities
People
- Weinong W. Chen
Organizations
- Purdue University