Research Initiative (RI) Proposal to Enhance Oxide MBE Growth through Facilitization of an Ozone Source and Oxygen Resistant Zn Effusion Cell

Abstract

There were two primary objectives of this Research Initiative: (1) to purchase and install an oxygen resistant Zn effusion cell to assist with challenges due to oxidation of source cells, and (2) to complete the installation process and facilitization of an existing ozone generation system for our MBE growth chamber. Under the project, both objectives were met. A research scientist in the group, Dr. Huiyong Liu, was trained in the operation of the ozone source, and the MBE system is now ready for ozone growth experiments to determine the effectiveness of the oxide resistant Zn cell and the impact of ozone based oxide semiconductor growth in comparison to the typical oxygen plasma based epitaxy.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Feb 11, 2014
Accession Number
ADA603207

Entities

People

  • Winston V. Schoenfeld

Organizations

  • University of Central Florida

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Human Systems

DTIC Thesaurus Topics

  • Abstracts
  • Agreements
  • Demographic Cohorts
  • Department Of Defense
  • Diameters
  • Education
  • Effusion
  • Engineering
  • Information Operations
  • Injectors
  • Mathematics
  • Military Research
  • Monitoring
  • Oxides
  • Semiconductors
  • Students
  • Technology Transfer

Readers

  • Environmental Engineering
  • Research Science/Academic Research
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics