A String Model Etching Algorithm
Abstract
The basic algorithm and software implementation of a string model for simulation of surface etching are presented. The algorithm models the time evolution of a line edge profile by advancing nodes or points on a piecewise linear curve representing the profile. The specific formulas for the direction and rate of advance, insertion and deletion of points and deletion of loops are shown. Complete software documentation in the form of parameter definitions and a listing of the FORTRAN code for a CDC 6400 machine are included.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 18, 1979
- Accession Number
- ADA605808
Entities
People
- Robert Jewett
Organizations
- University of California, Berkeley