A String Model Etching Algorithm

Abstract

The basic algorithm and software implementation of a string model for simulation of surface etching are presented. The algorithm models the time evolution of a line edge profile by advancing nodes or points on a piecewise linear curve representing the profile. The specific formulas for the direction and rate of advance, insertion and deletion of points and deletion of loops are shown. Complete software documentation in the form of parameter definitions and a listing of the FORTRAN code for a CDC 6400 machine are included.

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Document Details

Document Type
Technical Report
Publication Date
Oct 18, 1979
Accession Number
ADA605808

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  • Robert Jewett

Organizations

  • University of California, Berkeley

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  • Materials and Manufacturing Processes

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  • Algorithms
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  • Computer science

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  • Computational Modeling and Simulation
  • Graph Algorithms and Convex Optimization.
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