Characterization of Energetic Porous Silicon for a Microelectromechanical System (MEMS)-Based Solid Propellant Microthruster

Abstract

Silicon can be converted into porous silicon (PS) through a galvanic etch process and then rendered energetic when infused with any one of a number of oxidizers. Energetic PS can provide variable energy release to generate thrust and the displacement of small-scale devices such as microthrusters and micro-satellites. In this report, we investigate the etch process and its repeatability for pore formation during etches. We found that using a fresh etch bath reduces variability in pore characteristics. In addition, we examine the thrust output of a combustion reaction of PS activated with sodium perchlorate. Experimental testing showed that the forces ranged from tens to hundreds of millinewtons, depending on the silicon wafer resistivity and pore morphology, which is controlled by the etch parameters.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2014
Accession Number
ADA608703

Entities

People

  • Christopher J. Morris
  • David Lunking
  • Raghav Ramachandran
  • Wayne Churaman

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Combustion
  • Energetic Materials
  • Exothermic Reactions
  • Fabrication
  • Hydrogen
  • Materials
  • Materials Laboratories
  • Materials Testing
  • Measurement
  • Microelectromechanical Systems
  • Micromachining
  • Porous Materials
  • Propellants
  • Propulsion Systems
  • Rocket Oxidizers
  • Solid Propellants
  • Thrusters

Readers

  • Mathematics or Statistics
  • Rocket Propulsion.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems
  • Space
  • Space - Hall-Effect Thruster