Emergence of Very Broad Infrared Absorption Band By Hyperdoping of Silicon with Chalcogens
Abstract
We report the near through mid-infrared (MIR) optical absorption spectra, over the range 0.05 1.3 eV, of monocrystalline silicon layers hyperdoped with chalcogen atoms synthesized by ion implantation followed by pulsed laser melting. A broad mid-infrared optical absorption band emerges, peaking near 0.5 eV for sulfur and selenium and 0.3 eV for tellurium hyperdoped samples. Its strength and width increase with impurity concentration. Its strength decreases markedly with subsequent thermal annealing. The emergence of a broad MIR absorption band is consistent with the formation of an impurity band from isolated deep donor levels as the concentration of chalcogen atoms in metastable local configurations increases.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 03, 2013
- Accession Number
- ADA608971
Entities
People
- Atsushi Kohno
- Dimitris G. Papazoglou
- Ikurou Umezu
- James S. Williams
- Jeffrey M. Warrender
- Malek Tabbal
- Michael J. Azis
- Supakit Charnvanichborikarn
- Xi-Cheng Zhang
Organizations
- University of Central Florida