Time Domain Switched Accelerometer Design and Fabrication

Abstract

The objective of this report is to record the decision-making process for developing the device design and fabrication workflow for the time-domain switched accelerometers (TDSA) developed as part of the Naval Innovative Science and Engineering (NISE)-funded project "Time Domain Switching Proof Mass Proximity Switch Utilization for Inertial Navigation." The design and fabrication of these devices was based on using a sacrificial layer that both defines a capacitive gap for a sliding, non-contact proximity switch and frees a wafer-thick proof-mass to vibrate in the plane of the wafer. Time-domain switched accelerometers can be built using a three-mask process. The vacuum-sealing process described in this report is conducted at a low temperature and can be used to vacuum pack the devices on wafer.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2014
Accession Number
ADA611322

Entities

People

  • Andrew Wang
  • Paul Swanson

Organizations

  • Naval Information Warfare Systems Command

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Vapor Deposition
  • Department Of Defense
  • Engineering
  • Fabrication
  • Flip Chips
  • Frequency
  • Governments
  • Inertial Navigation
  • Low Temperature
  • Microelectromechanical Systems
  • Navigation
  • Resonant Frequency
  • Silicon Dioxide
  • Time Domain
  • Time Intervals
  • United States Government

Fields of Study

  • Materials science

Readers

  • Control Systems Engineering.
  • Electrical Engineering
  • Robotics and Automation.