Dynamic Actuation of Single-Crystal Diamond Nanobeams

Abstract

We show the dielectrophoretic actuation of single-crystal diamond nanomechanical devices using gradient radio-frequency electromagnetic forces. Both cantilever and doubly clamped beams, fabricated using our angled-etching fabrication technique,1 are demonstrated, with operation frequencies ranging from a few MHz to 50 MHz. Frequency tuning and parametric actuation are also studied.

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Document Details

Document Type
Technical Report
Publication Date
Aug 25, 2014
Accession Number
ADA615891

Entities

People

  • Marko Loncar
  • Michael J. Burek
  • Young-ik Sohn

Organizations

  • Harvard University

Tags

Communities of Interest

  • Air Platforms

DTIC Thesaurus Topics

  • Brownian Motion
  • Crystals
  • Electron Beam Lithography
  • Engineering
  • Equations
  • Fabrication
  • Frequency
  • Geometry
  • Mechanics
  • Nanoelectromechanical Systems
  • Radio Frequency
  • Resonance
  • Resonant Frequency
  • Signal Generators
  • Single Crystals
  • Spectrum Analyzers
  • United States

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.