Polarity Control and Doping in Aluminum Gallium Nitride
Abstract
AlGaN can be used for the fabrication of lateral polar structures (LPS) by a periodic inversion of the c-axis as achieved by a polarity control scheme during its growth by metal organic chemical vapor deposition (MOCVD). These structures can be used for second harmonic generation in the ultraviolet spectral region, as well as for lateral p/n-junctions. The two major challenges addressed in this work exist in the general implementation of the AlGaN technology and in the fabrication of AlGaN LPS, and both prevent the realization of AlGaN UV-emitters. These challenges are: (1) the presence of a high concentrations of native defects and extrinsic impurities in AlGaN that can reduce the efficiency of optoelectronic devices, especially in the case of high doping with Mg or Si, and (2) as typically observed, a growth rate difference that exists during the simultaneous growth of III- and N-polar domains adjacent to each other in a LPS.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2013
- Accession Number
- ADA623747
Entities
People
- Marc P. Hoffmann
Organizations
- North Carolina State University