In-Situ Analysis System for Correlated Electron Heterostructures

Abstract

We report on successful and unique design and implementation of highly expandable and compact photo-electron spectroscopy tools for in-situ characterization of complex functional superlattices and ultra-thin films. The analytical instruments are directly coupled with the PLD growth chamber. Our sample manipulator is designed for the sample transfer into either chamber. Initially, the prime set of tools allows for XPS, Auger and EELS spectroscopies.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Nov 20, 2014
Accession Number
ADA625421

Entities

People

  • Jak Chakhalian

Organizations

  • University of Arkansas

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Acquisition
  • Auger Electron Spectroscopy
  • Auger Electrons
  • Department Of Defense
  • Electron Energy
  • Electron Spectroscopy
  • Electrons
  • Films
  • High Resolution
  • High Temperature
  • Mathematics
  • Single Crystals
  • Spectra
  • Spectroscopy
  • Students
  • Thin Films
  • X Rays

Readers

  • Robotics and Automation.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene