Micro-Electro-Mechanical Systems (MEMS) Fabrication Course Projects Review for FY15
Abstract
In Fiscal Year (FY) 2015, the third year of a three-year Naval Innovative Science and Engineering (NISE) Program Workforce Development project, Space and Naval Warfare Systems Center (SSC Pacific) held a course on micro-electro-mechanical (MEMS) and semiconductor device and fabrication techniques to assist its Science and Techno (S&T) scientists and engineers to technologies that increase the capabilities of the U.S. Navy warfighters. The objective of this workforce development project is to further develop and offer a course for SSC Pacific S&T professionals to broaden their skills, experience, and understanding of MEMS and lithography-based device fabrication through instruction and hands-on experience. The course was 14 weeks, consisted of 16 hours of lectures at SSC Pacific, and 32 hours at a local semiconductor fabrication facility with an external user program (in this case, at the San Diego State University [SDSU] MEMS lab). The SSC Pacific and SDSU instructors were experienced in semiconductor processing and MEMS design. The students became familiar with the capabilities of semiconductor fabrication, allowing device development using less money (compared to outsourcing) and more hands-on interaction and process ownership. The course was not for the students to complete their projects in the initial 14 weeks, but to act as a launching pad for new innovations that will assist funded projects and stimulate the creation of new funded projects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 2015
- Accession Number
- ADA626169
Entities
People
- Bruce D. Offord
- Paul D. Swanson
- Samual K. Kassegne
Organizations
- Naval Information Warfare Systems Command