Dopant-Free GaN/AlN/AlGaN Radial Nanowire Heterostructures as High Electron Mobility Transistors

Abstract

We report the rational synthesis of dopant-free GaN/AlN/AlGaN radial nanowire heterostructures and their implementation as high electron mobility transistors (HEMTs). The radial nanowire heterostructures were prepared by sequential shell growth immediately following nanowire elongation using metal-organic chemical vapor deposition (MOCVD). Transmission electron microscopy (TEM) studies reveal that the GaN/ AlN/AlGaN radial nanowire heterostructures are dislocation-free single crystals. In addition, the thicknesses and compositions of the individual AlN and AlGaN shells were unambiguously identified using cross-sectional high-angle annular darkfield scanning transmission electron microscopy (HAADF-STEM). Transport measurements carried out on GaN/AlN/AlGaN and GaN nanowires prepared using similar conditions demonstrate the existence of electron gas in the undoped GaN/AlN/AlGaN nanowire heterostructures and also yield an intrinsic electron mobility of 3100 cm2/Vs and 21 000 cm2/Vs at room temperature and 5 K, respectively, for the heterostructure. Field-effect transistors fabricated with ZrO2 dielectrics and metal top gates showed excellent gate coupling with near ideal subthreshold slopes of 68 mV/dec, an on/off current ratio of 107, and scaled on-current and transconductance values of 500 mA/mm and 420 mS/mm. The ability to control synthetically the electronic properties of nanowires using band structure design in III-nitride radial nanowire heterostructures opens up new opportunities for nanoelectronics and provides a new platform to study the physics of low-dimensional electron gases.

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Document Details

Document Type
Technical Report
Publication Date
Jun 10, 2006
Accession Number
ADA630604

Entities

People

  • Charles M. Lieber
  • Douglas A. Blom
  • Fang Qian
  • Hao Yan
  • Jie Xiang
  • Silvija Gradečak
  • Yat Li
  • Yue Wu

Organizations

  • Harvard University

Tags

DTIC Thesaurus Topics

  • Charge Carriers
  • Chemistry
  • Dislocations
  • Electron Gas
  • Electron Mobility
  • Electronic Circuits
  • Electronic Mail
  • Electronics Laboratories
  • Energy Bands
  • Engineering
  • Field Effect Transistors
  • Heterojunctions
  • High Electron Mobility Transistors
  • Metal Oxide Semiconductors
  • Scattering
  • Semiconductors
  • Single Crystals

Fields of Study

  • Materials science

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene