Effects of Focused Ion Beam Induced Damage on the Plasticity of Micropillars

Abstract

The hardening effects of focused ion beam (FIB) induced damage produced during the fabrication of micropillars are examined by introducing a surface layer of nanosized obstacles into a dislocation dynamics simulation. The influence of the depth and strength of the obstacles as a function of pillar diameter is assessed parametrically. We show that for a selected set of sample sizes between 0.5 and 1.0 micrometer, the flow strength can increase by 10 20%, for an obstacle strength of 750 MPa, and damage depth of 100 nm. On the other hand, for sizes larger and smaller than this range, the effect of damage is negligible. Results show that the obstacles formed during the FIB milling may be expected to alter the microstructure of micropillars, however, they have a negligible effect on the observed size-strength scaling laws.

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Document Details

Document Type
Technical Report
Publication Date
Sep 09, 2009
Accession Number
ADA631097

Entities

People

  • Christopher Woodward
  • Dennis M. Dimiduk
  • Jaafar A El-Awady
  • Nasr M. Ghoniem

Organizations

  • University of California, Los Angeles

Tags

Communities of Interest

  • Energy and Power Technologies
  • Space

DTIC Thesaurus Topics

  • Air Force
  • Air Force Research Laboratories
  • Computational Science
  • Fabrication
  • Hardening
  • Ion Beams
  • Ions
  • Materials
  • Mechanical Properties
  • Mechanics
  • Molecular Dynamics
  • Plastic Properties
  • Shear Stresses
  • Simulations
  • Steady State
  • Strain Rate
  • Three Dimensional

Readers

  • Mechanical Engineering/Mechanics of Materials.
  • Military History / Militaries and War Studies
  • Plasma Physics / Magnetohydrodynamics