Resistively Actuated Micromechanical Dome Resonators
Abstract
We demonstrate dome-shaped, radio frequency, micromechanical resonators with integrated thermo-elastic actuators. Such resonators can be used as the frequency-determining element of a local oscillator or as a combination of a mixer and IF filter in a superheterodyne transceiver. The dome resonators (shallow shell segments clamped on the periphery) are fabricated utilizing pre-stressed thin polysilicon film over sacrificial silicon dioxide. The shell geometry enhances the rigidity of the structure, providing a resonant frequency several times higher than a flat membrane of the same dimensions. The finite curvature of the shell also couples out-of-plane deflection with in-plane stress, providing an actuation mechanism. Out-of-plane motion is induced by employing non-homogeneous, thermomechanical stress, generated in plane by local heating. A metal resistor provides thermal stress by dissipating 4 microwatts of Joule heat. The diminished heat capacity of the MEMS device enables a heating/cooling rate comparable to the frequency of mechanical resonance and allows operation of the resonator by applying AC current through the microheater. We show that when a superposition of two AC signals is applied to the resistive heater, the driving force can be detected at combinatory frequencies, due to the fact that the driving thermomechanical stress is determined by the square of the heating current. Thus the thermoelastic actuator provides frequency mixing while the resonator itself performs as a high quality (Q roughly 10,000) intermediate frequency filter for the combinatory frequencies. A frequency generator is built by closing a positive feedback loop between the optical detection of the mechanical motion of the dome and the resistive drive. We demonstrate self-sustained oscillation of the dome resonator with frequency stability of 1.5 ppm and discuss the phase noise of the oscillator.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2004
- Accession Number
- ADA637554
Entities
People
- Bojan Ilic
- Brian H. Houston
- David A Czaplewski
- Harold G. Craighead
- Jeevak M. Parpia
- Keith L. Aubin
- Maxim K. Zalalutdinov
- Robert B. Reichenbach
Organizations
- Cornell University