Totem Pole Drive Decks for the High-Voltage, Pulsed-Power Modulator for a Large-Scale Plasma Source Ion Implantation System
Abstract
A new program is underway at Los Alamos National Laboratory to investigate on a large-scale, plasma source ion implantation (PSII) . PSII is an industrially-relevant technique to change the surface composition of materials, thereby improving the mechanical, chemical, electrical, or optical properties of the base material. Pre-manufactured parts are immersed in a plasma and are pulsed with a high voltage source that accelerates the ions to the surface, where they become implanted, modifying the surface characteristics. The high voltage applied to the "workpiece" is supplied by a high-voltage, pulsed-power modulator capable of operating to 120 kV, with an output pulse width to 20 uS at a repetition rate of up to 2 kHz. Output currents of up to 60 A, and average powers of 225 kW (6.6 MW peak) will be the ultimate capability. 1 Initial system start-up will be limited by a 60 kV, 1 A charging power supply. This paper describes the totem pole drive decks, the "on" deck and "off" deck, used as a pre-driver to the main high voltage switch tubes which applies power to the workpiece. The pulse length and frequency are externally controlled and then fiber-optically coupled to the modulator totem pole drive decks. The circuitry of the planar triode drivers will be presented in addition to experimental results.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1993
- Accession Number
- ADA637603
Entities
People
- R. J. Gribble
- W. A. Reass
Organizations
- Los Alamos National Laboratory