A Pulsed Electron Accelerator Using Solid Dielectric Energy Storage
Abstract
A new accelerator, designated SPI-PULSE 7000, was designed to produce high-current (>50 kA) low-average-energy (10-30 keV) pulses of electrons with beam diameters up to 15 em. The accelerator will be used to anneal ion implantation damage in silicon solar cell wafers in a single 100 ns pulse. The 2.6 kJ energy store of the accelerator consists of an array of cylindrical solid dielectric transmission lines which are d.c. charged to voltages up to 300 kV. As many as 19 of the 3 nF lines can be discharged in parallel by a single spark switch. The lines are cast from high dielectric-strength epoxy using techniques developed at Spire.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1981
- Accession Number
- ADA638154
Entities
People
- G. K. Simcox
- R. A. Kiesling
- R. G. Little
- W. Halverson