Development of an Intense Surface Discharge Pumped Vacuum Ultraviolet Lamp
Abstract
A large area (15 cm x 15 cm) uniform vacuum ultraviolet light source employing surface discharge pumping scheme has been developed for semiconductor processing applications. A low inductance pulsed power circuit for initiating the large area uniform surface discharge was constructed. The total stored energy in the capacitors (4.21-muF) is 1.9 kJ when charged to 30 kV. A current pulse of 1.5 microsecond with a peak of 210 kA is deposited to the discharge load from the three capacitor modules. The uniformity of the light over the large area surface discharge is 5% on the surface from visible light measurement when alumina is used as a discharge plate material.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1995
- Accession Number
- ADA638567
Entities
People
- Hidekazu Hatanaka
- Robert C. Sze
Organizations
- Los Alamos National Laboratory