OOPIC Simulation of a Cylindrical Magnetron Glow Discharge

Abstract

An Object Oriented Particle-in-Cell model of a plasma glow discharge in a cylindrical magnetron cleaning device has been developed to provide guidance in developing a novel in situ surface conditioning technique. The model tracks the trajectories of particles by solving the equations of motion and the electrostatic field equations. Simulation results are compared to experimental measurements obtained from a plasma probe at 3 axial positions along the substrate surface.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2008
Accession Number
ADA640100

Entities

People

  • Fang Yee
  • John Verboncoeur
  • Krystyna Truszkowsa
  • Mark A. Johnson
  • Mick Cipollo

Organizations

  • United States Army Armament Research, Development and Engineering Center

Tags

Communities of Interest

  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Abstracts
  • Charged Particles
  • Contracts
  • Differential Equations
  • Electric Fields
  • Electromagnetic Fields
  • Electron Density
  • Electrons
  • Electrostatic Fields
  • Engineering
  • Equations
  • Equations Of Motion
  • Glow Discharges
  • Magnetic Fields
  • Partial Differential Equations
  • Simulations
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Computational Modeling and Simulation
  • Pulsed Power and Plasma Physics.
  • Thin Film Deposition Science.