Comparison of Commonly Used Excimer Laser Pulsed Power Circuitry
Abstract
This paper compares the electrical characteristics of the various types of pulsed power circuits commonly used in commercial excimer lasers. Sixty watt commercial krypton fluoride lasers are used as the test cases, however the lasers are multigas devices operating on all the usual excimer transitions. Circuit measurements made on these lasers are presented and energy and charge transfer through the systems are discussed and analyzed. Subsequently these circuits are discussed with regard to more recent circuit techniques to assess design approaches for higher power excimer lasers.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1987
- Accession Number
- ADA640191
Entities
People
- Robert W. Weeks
- Terrence J. Mckee