Semiconductor Oxide Interface States. Document Details Document Type Technical Report Publication Date Sep 01, 1978 Accession Number ADA955581 Entities People C. T. Sah Organizations University of Illinois Urbana–Champaign Tags DTIC Thesaurus Topics Carbides Chemical Compounds Compound Semiconductors Electronics Inorganic Carbon Compounds Inorganic Chemicals Semiconductors Solid State Electronics Technology Areas Microelectronics Microelectronics - Graphene