Cantilever Accelerometer.
Abstract
Two accelerometer models were designed, manufactured and evaluated during the contract term. These were built using combinations of poly and monocrystalline silicon for temperature insensitivity and high gauge factor. The basic physical structure on both models was the 'H' geometry. Thermal insensitivity was further enhanced via packaging in a self-regulating heater polymer. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1979
- Accession Number
- ADB045304
Entities
People
- Warren C. Rosvold