Database Needs for Modeling and Simulation of Plasma Processing.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1996
Accession Number
ADB220797

Entities

Organizations

  • National Research Council

Tags

Communities of Interest

  • Advanced Electronics
  • Biomedical

DTIC Thesaurus Topics

  • Chemical Kinetics
  • Chemical Reactions
  • Chemistry
  • Computational Science
  • Databases
  • Fabrication
  • Glow Discharges
  • Integrated Circuits
  • Materials Processing
  • Molecular Dynamics
  • Molecular Physics
  • Semiconductor Manufacturing
  • Semiconductors
  • Spectra
  • Spectrometry
  • Surface Chemistry
  • Two Dimensional