Thin Film MIS Photovoltaic Detector.
Abstract
The patent application concerns a thin film infrared photovoltaic detector and a technique for making a discrete detector and imaging arrays from polycrystalline semiconducting InSb films deposited on amorphous insulating substrates. The film is oxidized to provide an oxide layer over which semitransparent nickel counter-electrodes are then evaporated through a suitable aperture mask followed by a thick aluminum evaporation over the nickel in the region near the edge of the semiconductor to form a continuous metallic bridge between the active area and the area to which a lead is to be attached.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 19, 1973
- Accession Number
- ADD000441
Entities
People
- D. L. Lile
Organizations
- United States Department of the Navy