Growth of Epitaxial Layers from a Liquid Phase.

Abstract

The invention pertains to a method for preparing a substrate for subsequent liquid-phase epitaxial layer growth whereby the substrate traverses molten solvent metal of the substrate, or an unsaturated solution thereof, in an inert atmosphere at a temperature lying within a range from the melting point of the solvent metal to the melting point of the substrate.

Document Details

Document Type
Technical Report
Publication Date
Feb 10, 1977
Accession Number
ADD003540

Entities

People

  • Edward M. Swiggard
  • Howard Lessoff
  • Paul E. R. Nordquist

Organizations

  • United States Department of the Navy

Tags

DTIC Thesaurus Topics

  • Atmospheres
  • Controlled Atmospheres
  • Fluids
  • Inventions
  • Liquid Phases
  • Liquids
  • Melting
  • Melting Point
  • Phase
  • Substrates

Readers

  • Electrical Engineering
  • Semiconductor Device Technology
  • Surface Engineering/Surface Coating Technology.