Method for Fabricating Fine Line Patterns in Metal.
Abstract
A method for forming fine line, gold structural patterns on the surface of a suitable metal substrate which utilizes a photolithographic technique in combination with a controlled metal plating technique. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 17, 1977
- Accession Number
- ADD004134
Entities
People
- Joseph P. Lorenzo Jr
Organizations
- United States Department of the Air Force