Vertically Integrated Circuits.

Abstract

This document describes a vertically integrated circuit and method of manufacturing thereof characterized by the layering of thin films, such as silicon, and insulating films, such as silicon dioxide, and forming electrically active regions such as by ion implanting the necessary dopants into a three-dimensional matrix. (Author)

Document Details

Document Type
Technical Report
Publication Date
Mar 02, 1978
Accession Number
ADD004966

Entities

People

  • Monti E. Aklufi

Organizations

  • United States Department of the Navy

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Circuits
  • Diagrams
  • Dioxides
  • Films
  • Integrated Circuits
  • Manufacturing
  • Silicon
  • Silicon Dioxide
  • Thin Films
  • Three Dimensional

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Software Engineering

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene