Three Dimensional Integrated Circuits.
Abstract
Three dimensional integrated circuits are manufactured from compatible cofireable materials by extruding batched cofireable materials to form blocks of specified cross sections, selecting and stacking cross sections of various widths from different blocks in a specified manner to form the desired circuit and placing the stack in a furnace having a predetermined temperature time profile to properly sinter each of the materials. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 21, 1979
- Accession Number
- ADD005974
Entities
People
- Leopold J. Johnson
Organizations
- United States Department of the Navy