Stray Light Eliminator in a Scatterometer.
Abstract
This invention relates to scatterometer systems and in particular to scatterometer systems which eliminate stray light. Further this system relates to scatterometers which in addition to having stray light eliminated are able to dump excess light without heating or other surplus light problems. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 07, 1979
- Accession Number
- ADD006153
Entities
People
- John P. Rahn
Organizations
- United States Department of the Navy